Surfaces, Interfaces, and Films for Microelectronics

This book provides full coverage of surfaces, interfaces, and film fundamentals for microelectronics, as well as the physics and chemistry of microelectronics processing. Based on a course taught by the author for over 25 years at the University of North Carolina, this book offers a unique and informative blend of fundamental science, processing, and applications. Exercises and a liberal addition of application examples are provided,