Handbook of Deposition Technologies for Films and Coatings: Science, Applications and Technology (Materials Science and Process Technology Series. Electronic Materials and Process Technology)
Handbook of Deposition Technologies for Films and Coatings: Science, Applications and Technology (Materials Science and Process Technology Series. Electronic Materials and Process Technology)
By Rointan F. Bunshah
Publisher: Noyes Publications
Number Of Pages: 835
Publication Date: 1994-02-01
ISBN-10 / ASIN: 0815513372
ISBN-13 / EAN: 9780815513377
Binding: Hardcover
A decade after the first edition of this volume was published, this second edition is being brought out partly due to the excellent response to the first edition, and also to update the many improvements in deposition technologies, the mechanisms, and applications.
The entire volume has been extensively revised and contains 50% or more new material. Five entirely new chapters have been added. The organization of the book has also been changed in the following respects: (1) Considerably more material has been added in Plasma Assisted Vapor Deposition Processes; and (2) A new chapter on Metallurgical Coating Applications has been added.
Selected subjects include:
1. Definitions and concepts
2. Classification of coating processes
3. Unique features of deposited materials
4. Current applications
5. Frontier areas
6. Selection criteria
7. Plasma spraying and detonation gun techniques
8. Volume and surface reactions
9. Cleaning processes
10. Environmental control
11. Storage and handling
12. Surface modification
13. Passivation and preservation
14. Safety
15. Evaporation processes and apparatus
16. Sputter deposition techniques
17. Bombardment effects
18. Reactive ion plating
19. Nucleation
20. Selective deposition
21. Reactor influence on plasma behavior
22. Plasma-assisted techniques
23. Electrodeposition
24. Film growth
Summary: Basic thin films world
Rating: 4
This book is wonderful book for not only materials scientists but also semiconductor engineers to build the basic concept of the thin film deposition and coating. If you need a basic data or theory of the thin film deposition, I really recommend this book.
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